High-Performance ZnO Thin-Film Transistors Prepared by Atomic Layer Deposition

Title
High-Performance ZnO Thin-Film Transistors Prepared by Atomic Layer Deposition
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 66, Issue 7, Pages 2965-2970
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-05-25
DOI
10.1109/ted.2019.2915625

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