Flexible Al-Ti-Zn-O MIM Capacitors Fabricated by Room Temperature Atomic Layer Deposition and Their Electrical Performances
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Title
Flexible Al-Ti-Zn-O MIM Capacitors Fabricated by Room Temperature Atomic Layer Deposition and Their Electrical Performances
Authors
Keywords
Flexible capacitors, Room temperature ALD, Al-Ti-Zn-O dielectric, Polymer substrate
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume -, Issue -, Pages 159391
Publisher
Elsevier BV
Online
2021-03-06
DOI
10.1016/j.jallcom.2021.159391
References
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