High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric

Title
High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 66, Issue 8, Pages 3382-3386
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-07-08
DOI
10.1109/ted.2019.2924135

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