Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography

Synergistic Effect of Electron Scattering and Space Charge Transfer Enabled Unprecedented Room Temperature NO2 Sensing Response of SnO2

(2023) Yajie Zhang et al.   Small

A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China

(2022) Gaoqiang Niu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Review—Semiconductor Materials and Devices for Gas Sensors

(2022) Parameswari Raju et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Portable electronic nose system for fast gynecological-conditions diagnosis in consulting room: A case study

(2022) T.A. Kuchmenko et al.   SENSORS AND ACTUATORS B-CHEMICAL

Unmasking the Resolution–Throughput Tradespace of Focused‐Ion‐Beam Machining

(2022) Andrew C. Madison et al.   ADVANCED FUNCTIONAL MATERIALS

Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

(2021) Andrea Gaiardo et al.   SENSORS

A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing

(2021) Gyuweon Jung et al.   SENSORS AND ACTUATORS B-CHEMICAL

Gas sensor technologies and mathematical modelling for quality sensing in fruit and vegetable cold chains: A review

(2021) Xiang Wang et al.   TRENDS IN FOOD SCIENCE & TECHNOLOGY

MEMS Gas Sensors: A Review

(2021) Muhammad Izzudin Ahmad Asri et al.   IEEE SENSORS JOURNAL

Microheater: material, design, fabrication, temperature control, and applications—a role in COVID-19

(2021) Z. E. Jeroish et al.   BIOMEDICAL MICRODEVICES

Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

(2020) Nico Klingner et al.   Beilstein Journal of Nanotechnology

Recent advances in energy-saving chemiresistive gas sensors: A review

(2020) Sanjit Manohar Majhi et al.   Nano Energy

Surface engineering of Pt thin films by low energy heavy ion irradiation

(2020) Munish Kumar et al.   APPLIED SURFACE SCIENCE

Breath Sensors for Health Monitoring

(2019) Andreas T Güntner et al.   ACS Sensors

Advanced Micro- and Nano-Gas Sensor Technology: A Review

(2019) Haleh Nazemi et al.   SENSORS

Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation

(2019) Alvise Bagolini et al.   SENSORS AND ACTUATORS B-CHEMICAL

3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model

(2019) Lirong Zhao et al.   Applied Sciences-Basel

Suspended AlGaN/GaN HEMT NO2 Gas Sensor Integrated With Micro-heater

(2019) Jianwen Sun et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Reliability improvements of thin film platinum resistors on wafer-level and micro-hotplates at stress temperatures in the range of 140–290 °C

(2019) Timo Schössler et al.   MICROELECTRONICS RELIABILITY

The influence of titanium adhesion layer oxygen stoichiometry on thermal boundary conductance at gold contacts

(2018) David H. Olson et al.   APPLIED PHYSICS LETTERS

Development of micro-hotplate and its reliability for gas sensing applications

(2018) Mahanth Prasad et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Advanced scanning paths for focused ion beam milling

(2017) Hae-Sung Yoon et al.   VACUUM

Comparison of technologies for nano device prototyping with a special focus on ion beams: A review

(2017) L. Bruchhaus et al.   Applied Physics Reviews

Ultrasensitive NO 2 gas sensors using tungsten oxide nanowires with multiple junctions self-assembled on discrete catalyst islands via on-chip fabrication

(2016) Phung Thi Hong Van et al.   SENSORS AND ACTUATORS B-CHEMICAL

High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution

(2015) Shinji Okazaki   MICROELECTRONIC ENGINEERING

Dimensionality-dependent charge transport in close-packed nanoparticle arrays: from 2D to 3D

(2014) Ying Wang et al.   Scientific Reports

Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling

(2013) Fatin Syazana Jamaludin et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors

(2011) Woo-Jin Hwang et al.   SENSORS

The effect of heat treatments on the properties of Ti/Pt heating elements for gas sensor applications

(2010) N.H. Al-Hardan et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING