Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography
出版年份 2023 全文链接
标题
Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography
作者
关键词
-
出版物
Micromachines
Volume 14, Issue 11, Pages 2060
出版商
MDPI AG
发表日期
2023-11-05
DOI
10.3390/mi14112060
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