Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling
Published 2013 View Full Article
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Title
Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling
Authors
Keywords
Milling, Dwell Time, Beam Current, High Aspect Ratio, Pattern Size
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 19, Issue 12, Pages 1873-1888
Publisher
Springer Nature
Online
2013-09-21
DOI
10.1007/s00542-013-1912-y
References
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