Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling

Title
Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling
Authors
Keywords
Milling, Dwell Time, Beam Current, High Aspect Ratio, Pattern Size
Publisher
Springer Nature
Online
2013-09-21
DOI
10.1007/s00542-013-1912-y

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