A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
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Title
A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
Authors
Keywords
FET-type gas sensor, Low power consumption, Micro-heater, Indium oxide (In, 2, O, 3, ) film, NO, 2, gas, Air gap
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 334, Issue -, Pages 129642
Publisher
Elsevier BV
Online
2021-02-16
DOI
10.1016/j.snb.2021.129642
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