Suspended AlGaN/GaN HEMT NO2 Gas Sensor Integrated With Micro-heater

Published 2019 View Full Article

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Title
Suspended AlGaN/GaN HEMT NO2 Gas Sensor Integrated With Micro-heater
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 28, Issue 6, Pages 997-1004
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-10-04
DOI
10.1109/jmems.2019.2943403

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