3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model
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Title
3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model
Authors
Keywords
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Journal
Applied Sciences-Basel
Volume 9, Issue 23, Pages 5133
Publisher
MDPI AG
Online
2019-11-27
DOI
10.3390/app9235133
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