Surface engineering of Pt thin films by low energy heavy ion irradiation
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Title
Surface engineering of Pt thin films by low energy heavy ion irradiation
Authors
Keywords
Rutherford backscattering spectrometry (RBS), Argon plasma, Micro-architecture, Ion–surface interaction, Surface roughness, SRIM-TRIM calculations
Journal
APPLIED SURFACE SCIENCE
Volume 540, Issue -, Pages 148338
Publisher
Elsevier BV
Online
2020-11-04
DOI
10.1016/j.apsusc.2020.148338
References
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