A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China
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Title
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 32, Issue 5, Pages 054003
Publisher
IOP Publishing
Online
2022-03-09
DOI
10.1088/1361-6439/ac5b98
References
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