Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

Characterization of a high-brightness, laser-cooled Li+ ion source

(2019) J. R. Gardner et al.   JOURNAL OF APPLIED PHYSICS

Strain Anisotropy and Magnetic Domains in Embedded Nanomagnets

(2019) Magnus Nord et al.   Small

MoS2 Memtransistors Fabricated by Localized Helium Ion Beam Irradiation

(2019) Jakub Jadwiszczak et al.   ACS Nano

Structurally Controlled Large-Area 10 nm Pitch Graphene Nanomesh by Focused Helium Ion Beam Milling

(2018) Marek Edward Schmidt et al.   ACS Applied Materials & Interfaces

Site-controlled formation of single Si nanocrystals in a buried SiO2 matrix using ion beam mixing

(2018) Xiaomo Xu et al.   Beilstein Journal of Nanotechnology

Characteristics of krypton ion emission from a gas field ionization source with a single atom tip

(2017) Hiroyasu Shichi et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Xenon gas field ion source from a single-atom tip

(2017) Wei-Chiao Lai et al.   NANOTECHNOLOGY

Engineering the thermal conductivity along an individual silicon nanowire by selective helium ion irradiation

(2017) Yunshan Zhao et al.   Nature Communications

Ion beam profiling from the interaction with a freestanding 2D layer

(2017) Ivan Shorubalko et al.   Beilstein Journal of Nanotechnology

Comparison of technologies for nano device prototyping with a special focus on ion beams: A review

(2017) L. Bruchhaus et al.   Applied Physics Reviews

Mechanical behavior of copper containing a gas-bubble superlattice

(2016) Zhang-Jie Wang et al.   ACTA MATERIALIA

Nanopore fabrication and characterization by helium ion microscopy

(2016) D. Emmrich et al.   APPLIED PHYSICS LETTERS

Current density profile characterization and analysis method for focused ion beam

(2016) Yuval Greenzweig et al.   MICROELECTRONIC ENGINEERING

Liquid metal alloy ion sources—An alternative for focussed ion beam technology

(2016) Lothar Bischoff et al.   Applied Physics Reviews

Bright focused ion beam sources based on laser-cooled atoms

(2016) J. J. McClelland et al.   Applied Physics Reviews

Nano Josephson superconducting tunnel junctions in YBa2Cu3O7–δ directly patterned with a focused helium ion beam

(2015) Shane A. Cybart et al.   Nature Nanotechnology

Recent advances in focused ion beam technology and applications

(2014) Nabil Bassim et al.   MRS BULLETIN

Digging gold: keV He+ion interaction with Au

(2013) Vasilisa Veligura et al.   Beilstein Journal of Nanotechnology

In-Plane Epitaxial Growth of Self-Assembled Ge Nanowires on Si Substrates Patterned by a Focused Ion Beam

(2011) I. Carmen Marcus et al.   CRYSTAL GROWTH & DESIGN

The neon gas field ion source—a first characterization of neon nanomachining properties

(2011) Richard H. Livengood et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Optimization of focused ion beam performance

(2009) C. W. Hagen et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Alloy liquid metal ion source for carbon focused ion beams

(2009) P. Mazarov et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Focused ion beam technology and ultimate applications

(2009) Jacques Gierak   SEMICONDUCTOR SCIENCE AND TECHNOLOGY