Comparison of technologies for nano device prototyping with a special focus on ion beams: A review

Liquid metal alloy ion sources—An alternative for focussed ion beam technology

(2016) Lothar Bischoff et al.   Applied Physics Reviews

Ion-beam sources based on room-temperature ionic liquids for aerospace applications, nanotechnology, and microprobe analysis (review)

(2015) A. B. Tolstogouzov et al.   INSTRUMENTS AND EXPERIMENTAL TECHNIQUES

Avoiding Bias of Focused Ion Beam Edge Resolution Measurements at High Doses

(2015) Zinovi Malamud et al.   MICROSCOPY AND MICROANALYSIS

Direct-write three-dimensional nanofabrication of nanopyramids and nanocones on Si by nanotumefaction using a helium ion microscope

(2015) L Zhang et al.   NANOTECHNOLOGY

Enhanced photovoltaics inspired by the fovea centralis

(2015) Gil Shalev et al.   Scientific Reports

Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

(2015) R.D. Kelley et al.   MICROSCOPY AND MICROANALYSIS

The origin of conductivity in ion-irradiated diamond-like carbon – Phase transformation and atomic ordering

(2014) P. Philipp et al.   CARBON

Recent Advances in Nanoscale Bioinspired Materials

(2014) Melik C. Demirel et al.   MACROMOLECULAR BIOSCIENCE

Advances in source technology for focused ion beam instruments

(2014) Noel S. Smith et al.   MRS BULLETIN

High-resolution direct-write patterning using focused ion beams

(2014) Leonidas E. Ocola et al.   MRS BULLETIN

Toward Plasmonics with Nanometer Precision: Nonlinear Optics of Helium-Ion Milled Gold Nanoantennas

(2014) Heiko Kollmann et al.   NANO LETTERS

Enhanced broadband absorption in gold by plasmonic tapered coaxial holes

(2014) Lei Mo et al.   OPTICS EXPRESS

Cold atomic beam ion source for focused ion beam applications

(2013) B. Knuffman et al.   JOURNAL OF APPLIED PHYSICS

Strain relief and shape oscillations in site-controlled coherent SiGe islands

(2013) N Hrauda et al.   NANOTECHNOLOGY

Giant osmotic energy conversion measured in a single transmembrane boron nitride nanotube

(2013) Alessandro Siria et al.   NATURE

Ion beam lithography for Fresnel zone plates in X-ray microscopy

(2013) Kahraman Keskinbora et al.   OPTICS EXPRESS

Crystallization of Semiconductor Nanorods into Perfectly Faceted Hexagonal Superstructures

(2013) Ajay Singh et al.   PARTICLE & PARTICLE SYSTEMS CHARACTERIZATION

Ge/SiGe superlattices for nanostructured thermoelectric modules

(2013) D. Chrastina et al.   THIN SOLID FILMS

Growth of magnetic nanowires on self-organized stripe templates: Fe on Pd–O/W(110)

(2013) T.O. Menteş et al.   ULTRAMICROSCOPY

Hydrothermal Fabrication of Hierarchically Anatase TiO2 Nanowire arrays on FTO Glass for Dye-sensitized Solar Cells

(2013) Wu-Qiang Wu et al.   Scientific Reports

Three dimensional magnetic nanowires grown by focused electron-beam induced deposition

(2013) Amalio Fernández-Pacheco et al.   Scientific Reports

Inverse Design of Topographical Templates for Directed Self-Assembly of Block Copolymers

(2013) Adam F. Hannon et al.   ACS Macro Letters

Arrays of Arbitrarily Shaped Nanoparticles: Overlay-Errorless Direct Ion Write

(2013) Gediminas Gervinskas et al.   Advanced Optical Materials

Drawing graphene nanoribbons on SiC by ion implantation

(2012) S. Tongay et al.   APPLIED PHYSICS LETTERS

Low-temperature, site selective graphitization of SiC via ion implantation and pulsed laser annealing

(2012) Maxime G. Lemaitre et al.   APPLIED PHYSICS LETTERS

Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes

(2012) A. Nadzeyka et al.   MICROELECTRONIC ENGINEERING

High resolution and high density ion beam lithography employing HSQ resist

(2012) L. Bruchhaus et al.   MICROELECTRONIC ENGINEERING

Ion beam induced surface patterns due to mass redistribution and curvature-dependent sputtering

(2012) Omar Bobes et al.   PHYSICAL REVIEW B

Characterization of Si nanowires fabricated by Ga+FIB implantation and subsequent selective wet etching

(2011) R Böttger et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

3D-Tailored Gold Nanoparticles for Light Field Enhancement and Harvesting over Visible-IR Spectral Range

(2011) Lorenzo Rosa et al.   Journal of Physical Chemistry C

Focused Ion Beam Circuit Edit–A Look into the Past, Present, and Future

(2011) R Livengood et al.   MICROSCOPY AND MICROANALYSIS

Nanoscale focused ion beam from laser-cooled lithium atoms

(2011) B Knuffman et al.   NEW JOURNAL OF PHYSICS

Materials modifications using a multi-ion beam processing and lithography system

(2011) Bill R. Appleton et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Self-organization of Ge nanopattern under erosion with heavy Bi monomer and cluster ions

(2011) L. Bischoff et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Enhancing the Potential of Block Copolymer Lithography with Polymer Self-Consistent Field Theory Simulations

(2010) Rafal A. Mickiewicz et al.   MACROMOLECULES

Ionic liquid ion sources for silicon reactive machining

(2010) S. Guilet et al.   MICROELECTRONIC ENGINEERING

Ionic liquid ion sources as a unique and versatile option in FIB applications

(2010) Carla Perez-Martinez et al.   MICROELECTRONIC ENGINEERING

Magnetization reversal in Pt/Co(0.5 nm)/Pt nano-platelets patterned by focused ion beam lithography

(2010) J-P Adam et al.   NANOTECHNOLOGY

Spectroscopy of few-electron single-crystal silicon quantum dots

(2010) Martin Fuechsle et al.   Nature Nanotechnology

Self-Assembly of Ordered Semiconductor Nanoholes by Ion Beam Sputtering

(2009) Qiangmin Wei et al.   ADVANCED MATERIALS

Sub-10-nm nanolithography with a scanning helium beam

(2009) Vadim Sidorkin et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist

(2009) D. Winston et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography

(2009) Joel K. W. Yang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Direct FIB fabrication and integration of “single nanopore devices” for the manipulation of macromolecules

(2009) B. Schiedt et al.   MICROELECTRONIC ENGINEERING

Free-standing nanoparticle superlattice sheets controlled by DNA

(2009) Wenlong Cheng et al.   NATURE MATERIALS

Principles and applications of nanofluidic transport

(2009) W. Sparreboom et al.   Nature Nanotechnology

Properties and emerging applications of self-assembled structures made from inorganic nanoparticles

(2009) Zhihong Nie et al.   Nature Nanotechnology

Lithography gets extreme

(2009) Christian Wagner et al.   Nature Photonics

Structure and magnetism of self-assembled Fe nanowires on a faceted Cu(332) surface: the influence of oxygen-induced reconstruction

(2009) Carlos Eduardo ViolBarbosa et al.   NEW JOURNAL OF PHYSICS

Nano-structures for sensors on SOI by writing FIB implantation and subsequent anisotropic wet chemical etching

(2009) L. Bischoff et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Nanoparticle assembly for 1D and 2D ordered structures

(2009) Sudhanshu Srivastava et al.   Soft Matter

Self-assembly: from crystals to cells

(2009) Bartosz A. Grzybowski et al.   Soft Matter

Gas-assisted focused electron beam and ion beam processing and fabrication

(2008) Ivo Utke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Scanning proximal probes for parallel imaging and lithography

(2008) K. Ivanova et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

(2008) W F van Dorp et al.   NANOTECHNOLOGY

The role of interparticle and external forces in nanoparticle assembly

(2008) Younjin Min et al.   NATURE MATERIALS

Application of mass-separated focused ion beams in nano-technology

(2008) L. Bischoff   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Lithography and Other Patterning Techniques for Future Electronics

(2008) R.F. Pease et al.   PROCEEDINGS OF THE IEEE

Exploration of the ultimate patterning potential achievable with focused ion beams

(2008) J. Gierak et al.   ULTRAMICROSCOPY

Self-Assembling Nanoparticles at Surfaces and Interfaces

(2007) Sachin Kinge et al.   CHEMPHYSCHEM