The effect of heat treatments on the properties of Ti/Pt heating elements for gas sensor applications

Published 2010 View Full Article

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Title
The effect of heat treatments on the properties of Ti/Pt heating elements for gas sensor applications
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 13, Issue 3, Pages 199-204
Publisher
Elsevier BV
Online
2010-11-21
DOI
10.1016/j.mssp.2010.10.013

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