Development of micro-hotplate and its reliability for gas sensing applications
Published 2018 View Full Article
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Title
Development of micro-hotplate and its reliability for gas sensing applications
Authors
Keywords
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Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 124, Issue 11, Pages -
Publisher
Springer Nature
Online
2018-10-30
DOI
10.1007/s00339-018-2210-4
References
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- (2014) P. Bhattacharyya IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
- Metal-oxide gas sensor high-selective to ammonia
- (2013) N. N. Samotaev et al. AUTOMATION AND REMOTE CONTROL
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- (2013) Evgeny Е. Karpov et al. SENSORS AND ACTUATORS A-PHYSICAL
- FEM simulation of platinum‐based microhotplate using different dielectric membranes for gas sensing applications
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