Unmasking the Resolution–Throughput Tradespace of Focused‐Ion‐Beam Machining
Published 2022 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Unmasking the Resolution–Throughput Tradespace of Focused‐Ion‐Beam Machining
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 32, Issue 38, Pages 2111840
Publisher
Wiley
Online
2022-08-22
DOI
10.1002/adfm.202111840
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Roll-to-roll nanoimprint lithography of high efficiency Fresnel lenses for micro-concentrator photovoltaics
- (2021) Alejandra Jacobo-Martín et al. OPTICS EXPRESS
- Achieving micron-scale plasticity and theoretical strength in Silicon
- (2020) Ming Chen et al. Nature Communications
- Ultrafast photonic micro-systems to manipulate hard X-rays at 300 picoseconds
- (2019) Pice Chen et al. Nature Communications
- A fast and sensitive room-temperature graphene nanomechanical bolometer
- (2019) Andrew Blaikie et al. Nature Communications
- Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
- (2019) Rosa Córdoba et al. Scientific Reports
- Homogenous and ultra-shallow lithium niobate etching by focused ion beam
- (2019) Minni Qu et al. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
- A fully electric field driven scalable magnetoelectric switching element
- (2018) R. Ahmed et al. APPLIED PHYSICS LETTERS
- Fabrication of phonon-based metamaterial structures using focused ion beam patterning
- (2018) Nabil D. Bassim et al. APPLIED PHYSICS LETTERS
- Subnanometer structure and function from ion beams through complex fluidics to fluorescent particles
- (2018) Kuo-Tang Liao et al. LAB ON A CHIP
- Preventing damage and redeposition during focused ion beam milling: The “umbrella” method
- (2018) T. Vermeij et al. ULTRAMICROSCOPY
- Subnanometer localization accuracy in widefield optical microscopy
- (2018) Craig R. Copeland et al. Light-Science & Applications
- Teaching an Old Material New Tricks: Easy and Inexpensive Focused Ion Beam (FIB) Sample Protection Using Conductive Polymers
- (2017) Joshua A. Taillon et al. MICROSCOPY AND MICROANALYSIS
- Fluorescent sensing with Fresnel microlenses for optofluidic systems
- (2017) Anna Siudzinska et al. OPTICAL ENGINEERING
- Enhanced nanochannel translocation and localization of genomic DNA molecules using three-dimensional nanofunnels
- (2017) Jinsheng Zhou et al. Nature Communications
- Surface plasmon polariton laser based on a metallic trench Fabry-Perot resonator
- (2017) Wenqi Zhu et al. Science Advances
- Nanomanufacturing: A Perspective
- (2016) J. Alexander Liddle et al. ACS Nano
- Top-down, in-plane GaAs nanowire MOSFETs on an Al2O3buffer with a trigate oxide from focused ion-beam milling and chemical oxidation
- (2016) S C Lee et al. NANOTECHNOLOGY
- Metal assisted focused-ion beam nanopatterning
- (2016) Akash Kannegulla et al. NANOTECHNOLOGY
- High-contrast and fast electrochromic switching enabled by plasmonics
- (2016) Ting Xu et al. Nature Communications
- Focused ion beams in biology
- (2015) Kedar Narayan et al. NATURE METHODS
- Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library
- (2015) J.S. Villarrubia et al. ULTRAMICROSCOPY
- High-resolution direct-write patterning using focused ion beams
- (2014) Leonidas E. Ocola et al. MRS BULLETIN
- Replication of flexible polymer membranes with geometry-controllable nano-apertures via a hierarchical mould-based dewetting
- (2014) Hyesung Cho et al. Nature Communications
- Structural and optical characterization of Cr2O3 nanostructures: Evaluation of its dielectric properties
- (2014) M. M. Abdullah et al. AIP Advances
- Structural, mechanical and tribological characterization of chromium oxide thin films prepared by post-annealing of Cr thin films
- (2013) K. Khojier et al. APPLIED SURFACE SCIENCE
- Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing
- (2013) H. Wu et al. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
- Control of surface charge for high-fidelity nanostructuring of materials
- (2013) Gediminas Gervinskas et al. Laser & Photonics Reviews
- DNA detection with a polymeric nanochannel device
- (2011) Paola Fanzio et al. LAB ON A CHIP
- Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling
- (2010) Laurent D. Menard et al. NANO LETTERS
- Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process
- (2010) M Urbánek et al. NANOTECHNOLOGY
- SRIM – The stopping and range of ions in matter (2010)
- (2010) James F. Ziegler et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Optimization of a FIB/SEM slice-and-view study of the 3D distribution of Ni4Ti3precipitates in Ni-Ti
- (2009) S. CAO et al. JOURNAL OF MICROSCOPY
- Characterisation of FIB milling yield of metals by SEM stereo imaging technique
- (2009) H. Ostadi et al. MICROELECTRONIC ENGINEERING
- Prediction of nanopattern topography using two-dimensional focused ion beam milling with beam irradiation intervals
- (2009) Jin Han et al. MICROELECTRONIC ENGINEERING
- Fabrication of nanodot plasmonic waveguide structures using FIB milling and electron beam-induced deposition
- (2009) Anuj Dhawan et al. SCANNING
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExploreAdd your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload Now