Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation

Published 2019 View Full Article

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Title
Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation
Authors
Keywords
CMOS, BEOL, MEMS, PECVD, Silicon nitride, Silicon oxide, Microheater, Microfabrication, Gas sensor, Residual stress, Elastic modulus
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 292, Issue -, Pages 225-232
Publisher
Elsevier BV
Online
2019-04-24
DOI
10.1016/j.snb.2019.04.116

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