Top-down nanofabrication approaches toward single-digit-nanometer scale structures
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Title
Top-down nanofabrication approaches toward single-digit-nanometer scale structures
Authors
Keywords
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Journal
Journal of Mechanical Science and Technology
Volume 35, Issue 3, Pages 837-859
Publisher
Springer Science and Business Media LLC
Online
2021-02-27
DOI
10.1007/s12206-021-0243-7
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