Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale

Published 2017 View Full Article

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Title
Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale
Authors
Keywords
-
Journal
NANO LETTERS
Volume 17, Issue 8, Pages 4562-4567
Publisher
American Chemical Society (ACS)
Online
2017-04-19
DOI
10.1021/acs.nanolett.7b00514

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