High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

Published 2016 View Full Article

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Title
High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography
Authors
Keywords
-
Journal
NANO LETTERS
Volume 16, Issue 3, Pages 2040-2046
Publisher
American Chemical Society (ACS)
Online
2016-02-25
DOI
10.1021/acs.nanolett.6b00024

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