Thermal scanning probe lithography for the directed self-assembly of block copolymers

Published 2017 View Full Article

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Title
Thermal scanning probe lithography for the directed self-assembly of block copolymers
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 28, Issue 17, Pages 175301
Publisher
IOP Publishing
Online
2017-04-06
DOI
10.1088/1361-6528/aa673c

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