Resolution Limits of Electron-Beam Lithography toward the Atomic Scale

Published 2013 View Full Article

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Title
Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
Authors
Keywords
-
Journal
NANO LETTERS
Volume 13, Issue 4, Pages 1555-1558
Publisher
American Chemical Society (ACS)
Online
2013-03-15
DOI
10.1021/nl304715p

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