A brief review of atomic layer deposition: from fundamentals to applications

Published 2014 View Full Article

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Title
A brief review of atomic layer deposition: from fundamentals to applications
Authors
Keywords
-
Journal
Materials Today
Volume 17, Issue 5, Pages 236-246
Publisher
Elsevier BV
Online
2014-05-10
DOI
10.1016/j.mattod.2014.04.026

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