Single digit nanofabrication by step-and-repeat nanoimprint lithography

Title
Single digit nanofabrication by step-and-repeat nanoimprint lithography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 1, Pages 015305
Publisher
IOP Publishing
Online
2011-12-08
DOI
10.1088/0957-4484/23/1/015305

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