Top-down nanofabrication approaches toward single-digit-nanometer scale structures

Printable Nanocomposite Metalens for High-Contrast Near-Infrared Imaging

(2021) Gwanho Yoon et al.   ACS Nano

Tunable metasurfaces for visible and SWIR applications

(2020) Chang-Won Lee et al.   Nano Convergence

Development of Nickel-Based Negative Tone Metal Oxide Cluster Resists for Sub-10 nm Electron Beam and Helium Ion Beam Lithography

(2020) Rudra Kumar et al.   ACS Applied Materials & Interfaces

Imaging of Nanoscale Light Confinement in Plasmonic Nanoantennas by Brownian Optical Microscopy

(2020) Yeon Ui Lee et al.   ACS Nano

Multiarray Nanopattern Electronic Nose (E‐Nose) by High‐Resolution Top‐Down Nanolithography

(2020) Hohyung Kang et al.   ADVANCED FUNCTIONAL MATERIALS

Recent Progress in Simple and Cost-Effective Top-Down Lithography for ≈10 nm Scale Nanopatterns: From Edge Lithography to Secondary Sputtering Lithography

(2020) Woo-Bin Jung et al.   ADVANCED MATERIALS

Multilevel Resistance Switching and Enhanced Spin Transition Temperature in Single and Double Molecule Spin Crossover Nanogap Devices

(2020) Alex Gee et al.   Journal of Physical Chemistry C

Single-step manufacturing of hierarchical dielectric metalens in the visible

(2020) Gwanho Yoon et al.   Nature Communications

Moth-eye shaped on-demand broadband and switchable perfect absorbers based on vanadium dioxide

(2020) Trevon Badloe et al.   Scientific Reports

Enhancement of upconversion luminescence using photonic nanostructures

(2020) Ananda Das et al.   Nanophotonics

Progress of infrared guided-wave nanophotonic sensors and devices

(2020) Yiming Ma et al.   Nano Convergence

Soft optical metamaterials

(2020) Yixin Chen et al.   Nano Convergence

Perovskite Quantum Dot Lasing in a Gap-Plasmon Nanocavity with Ultralow Threshold

(2020) Yu-Hung Hsieh et al.   ACS Nano

Metasurface enhanced sensitized photon upconversion: towards highly efficient low power upconversion applications and nano-scale E-field sensors

(2020) Christian Würth et al.   NANO LETTERS

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

(2020) Taejun Lee et al.   SENSORS

Hybrid plasmonic nano-emitters with controlled single quantum emitter positioning on the local excitation field

(2020) Dandan Ge et al.   Nature Communications

High‐Throughput Nanofabrication of Metasurfaces with Polarization‐Dependent Response

(2020) Cristiano Matricardi et al.   Advanced Optical Materials

Structural color switching with a doped indium-gallium-zinc-oxide semiconductor

(2020) Inki Kim et al.   Photonics Research

Thermally assisted nanotransfer printing with sub–20-nm resolution and 8-inch wafer scalability

(2020) Tae Wan Park et al.   Science Advances

Diffraction-induced enhancement of optical spin Hall effect in a dielectric grating

(2020) Minkyung Kim et al.   APL Photonics

Low-temperature large-area fabrication of ZnO nanowires on flexible plastic substrates by solution-processible metal-seeded hydrothermal growth

(2020) Kangeun Yoo et al.   Nano Convergence

Laser digital patterning of conductive electrodes using metal oxide nanomaterials

(2020) Vu Binh Nam et al.   Nano Convergence

Planar Achiral Metasurfaces-Induced Anomalous Chiroptical Effect of Optical Spin Isolation

(2020) Ahsan Sarwar Rana et al.   ACS Applied Materials & Interfaces

Spectral Modulation through the Hybridization of Mie-Scatterers and Quasi-Guided Mode Resonances: Realizing Full and Gradients of Structural Color

(2020) Jaehyuck Jang et al.   ACS Nano

Cascade domino lithography for extreme photon squeezing

(2020) Inki Kim et al.   Materials Today

Complex-amplitude metasurface-based orbital angular momentum holography in momentum space

(2020) Haoran Ren et al.   Nature Nanotechnology

Hopping of single nanoparticles trapped in a plasmonic double-well potential

(2020) Seung Ju Yoon et al.   Nanophotonics

Capillary-force-induced collapse lithography for controlled plasmonic nanogap structures

(2020) Inki Kim et al.   Microsystems & Nanoengineering

Air-stable and ultrasensitive solution-cast SWIR photodetectors utilizing modified core/shell colloidal quantum dots

(2020) Jin-Beom Kwon et al.   Nano Convergence

Spin-valley locked topological edge states in a staggered chiral photonic crystal

(2020) Minkyung Kim et al.   NEW JOURNAL OF PHYSICS

Near-zero reflection of all-dielectric structural coloration enabling polarization-sensitive optical encryption with enhanced switchability

(2020) Chunghwan Jung et al.   Nanophotonics

Recent advances in nanomaterial-modified electrical platforms for the detection of dopamine in living cells

(2020) Yeon-Woo Cho et al.   Nano Convergence

GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis

(2020) Deying Xia et al.   APPLIED SURFACE SCIENCE

Tunable Metasurfaces: Kerker-Conditioned Dynamic Cryptographic Nanoprints (Advanced Optical Materials 4/2019)

(2019) Jaehyuck Jang et al.   Advanced Optical Materials

Large-Area, Optical Variable-Color Metasurfaces Based on Pixelated Plasmonic Nanogratings

(2019) Shangliang Wu et al.   Advanced Optical Materials

Volume‐Enhanced Raman Scattering Detection of Viruses

(2019) Xingang Zhang et al.   Small

Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities

(2019) Tapajyoti Das Gupta et al.   Nature Nanotechnology

Geometrically flat hyperlens designed by transformation optics

(2019) Sunae So et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

High Responsivity and Response Speed Single‐Layer Mixed‐Cation Lead Mixed‐Halide Perovskite Photodetectors Based on Nanogap Electrodes Manufactured on Large‐Area Rigid and Flexible Substrates

(2019) Dimitra G. Georgiadou et al.   ADVANCED FUNCTIONAL MATERIALS

Periodic Arrays of Diamond‐Shaped Silver Nanoparticles: From Scalable Fabrication by Template‐Assisted Solid‐State Dewetting to Tunable Optical Properties

(2019) Paul Jacquet et al.   ADVANCED FUNCTIONAL MATERIALS

A Spin‐Encoded All‐Dielectric Metahologram for Visible Light

(2019) Muhammad Afnan Ansari et al.   Laser & Photonics Reviews

Nanoscale spatial limitations of large-area substrate conformal imprint lithography (SCIL)

(2019) Marc A Verschuuren et al.   NANOTECHNOLOGY

Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

(2019) Aishwaryadev Banerjee et al.   Nanomaterials

Facile Nanocasting of Dielectric Metasurfaces with Sub-100 nm Resolution

(2019) Kwan Kim et al.   ACS Applied Materials & Interfaces

Patterning Si at the 1 nm Length Scale with Aberration‐Corrected Electron‐Beam Lithography: Tuning of Plasmonic Properties by Design

(2019) Vitor R. Manfrinato et al.   ADVANCED FUNCTIONAL MATERIALS

Dual-frequency CMOS terahertz detector with silicon-based plasmonic antenna

(2019) Ruizhi Huang et al.   OPTICS EXPRESS

Tip-enhanced strong coupling spectroscopy, imaging, and control of a single quantum emitter

(2019) Kyoung-Duck Park et al.   Science Advances

Label-free detection of γ-aminobutyric acid based on silicon nanowire biosensor

(2019) Jin-Ho Lee et al.   Nano Convergence

A quasi-ballistic drain current, charge and capacitance model with positional carrier scattering dependency valid for symmetric DG MOSFETs in nanoscale regime

(2019) Vyas R. Murnal et al.   Nano Convergence

Current trends and challenges in cancer management and therapy using designer nanomaterials

(2019) P. N. Navya et al.   Nano Convergence

Resolution enhancement of fluorescence microscopy using encoded patterns from all-dielectric metasurfaces

(2019) Dasol Lee et al.   APPLIED PHYSICS LETTERS

Facile and precise fabrication of 10-nm nanostructures on soft and hard substrates

(2019) Ju Yeon Woo et al.   APPLIED SURFACE SCIENCE

Plasma-Etched Pattern Transfer of Sub-10 nm Structures Using a Metal–Organic Resist and Helium Ion Beam Lithography

(2019) Scott M. Lewis et al.   NANO LETTERS

Observation of Enhanced Optical Spin Hall Effect in a Vertical Hyperbolic Metamaterial

(2019) Minkyung Kim et al.   ACS Photonics

Influence of indium-tin-oxide and emitting-layer thicknesses on light outcoupling of perovskite light-emitting diodes

(2019) Young-Jin Jung et al.   Nano Convergence

Sub-10 nm Resolution Patterning of Pockets for Enzyme Immobilization with Independent Density and Quasi-3D Topography Control

(2019) Xiangyu Liu et al.   ACS Applied Materials & Interfaces

Single-molecule single-electron transistor (SM-SET) based on π-conjugated quinoidal-fused oligosilole and heteroepitaxial spherical Au/Pt nanogap electrodes

(2019) Seung Joo Lee et al.   Applied Physics Express

Deep-Ultraviolet LEDs Fabricated by Nanoimprinting

(2019) Ray-Hua Horng et al.   ECS Journal of Solid State Science and Technology

Plasmonic nanogap enhanced phase-change devices with dual electrical-optical functionality

(2019) Nikolaos Farmakidis et al.   Science Advances

Improved optical performance of multi-layer MoS2 phototransistor with see-through metal electrode

(2019) Junghak Park et al.   Nano Convergence

High-Throughput Fabrication of Ultradense Annular Nanogap Arrays for Plasmon-Enhanced Spectroscopy

(2018) Hongbing Cai et al.   ACS Applied Materials & Interfaces

Structurally Controlled Large-Area 10 nm Pitch Graphene Nanomesh by Focused Helium Ion Beam Milling

(2018) Marek Edward Schmidt et al.   ACS Applied Materials & Interfaces

“Crypto-Display” in Dual-Mode Metasurfaces by Simultaneous Control of Phase and Spectral Responses

(2018) Gwanho Yoon et al.   ACS Nano

Surface-enhanced spectroscopy: Toward practical analysis probe

(2018) Jungho Mun et al.   APPLIED SPECTROSCOPY REVIEWS

Low-Power Optical Trapping of Nanoparticles and Proteins with Resonant Coaxial Nanoaperture Using 10 nm Gap

(2018) Daehan Yoo et al.   NANO LETTERS

High-Contrast Infrared Absorption Spectroscopy via Mass-Produced Coaxial Zero-Mode Resonators with Sub-10 nm Gaps

(2018) Daehan Yoo et al.   NANO LETTERS

Complete amplitude and phase control of light using broadband holographic metasurfaces

(2018) Gun-Yeal Lee et al.   Nanoscale

Sculpting Extreme Electromagnetic Field Enhancement in Free Space for Molecule Sensing

(2018) Fanxin Liu et al.   Small

Non-fluorescent nanoscopic monitoring of a single trapped nanoparticle via nonlinear point sources

(2018) Seung Ju Yoon et al.   Nature Communications

Geometric metasurface enabling polarization independent beam splitting

(2018) Gwanho Yoon et al.   Scientific Reports

Active Color Control in a Metasurface by Polarization Rotation

(2018) Minkyung Kim et al.   Applied Sciences-Basel

Distinct Mechanosensing of Human Neural Stem Cells on Extremely Limited Anisotropic Cellular Contact

(2018) Jieung Baek et al.   ACS Applied Materials & Interfaces

Polarisation insensitive multifunctional metasurfaces based on all-dielectric nanowaveguides

(2018) Nasir Mahmood et al.   Nanoscale

Massively parallel fabrication of crack-defined gold break junctions featuring sub-3 nm gaps for molecular devices

(2018) Valentin Dubois et al.   Nature Communications

Polarization-sensitive tunable absorber in visible and near-infrared regimes

(2018) Dasol Lee et al.   Scientific Reports

Outfitting next generation displays with optical metasurfaces

(2018) Inki Kim et al.   ACS Photonics

Rabi Splitting in a Plasmonic Nanocavity Coupled to a WS2 Monolayer at Room Temperature

(2018) Xiaobo Han et al.   ACS Photonics

Metal-Assisted Transfer Strategy for Construction of 2D and 3D Nanostructures on an Elastic Substrate

(2018) Wenjie Liu et al.   ACS Nano

Robust Pt-based nanogap electrodes with 10 nm scale ultrafine linewidth

(2018) Yoon Young Choi et al.   Applied Physics Express

Sub-5 nm Metal Nanogaps: Physical Properties, Fabrication Methods, and Device Applications

(2018) Yang Yang et al.   Small

Asymmetric Nanocrescent Antenna on Upconversion Nanocrystal

(2017) Doyeon Bang et al.   NANO LETTERS

Self-Collapse Lithography

(2017) Chuanzhen Zhao et al.   NANO LETTERS

Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale

(2017) Vitor R. Manfrinato et al.   NANO LETTERS

Facile three-dimensional nanoarchitecturing of double-bent gold strips on roll-to-roll nanoimprinted transparent nanogratings for flexible and scalable plasmonic sensors

(2017) Jung-Sub Wi et al.   Nanoscale

Plasmonic color metasurfaces fabricated by a high speed roll-to-roll method

(2017) Swathi Murthy et al.   Nanoscale

Thermal scanning probe lithography for the directed self-assembly of block copolymers

(2017) S Gottlieb et al.   NANOTECHNOLOGY

Radiative control of dark excitons at room temperature by nano-optical antenna-tip Purcell effect

(2017) Kyoung-Duck Park et al.   Nature Nanotechnology

Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay

(2017) Gwanho Yoon et al.   Scientific Reports

Efficient Mid-Infrared Light Confinement within Sub-5-nm Gaps for Extreme Field Enhancement

(2017) Dengxin Ji et al.   Advanced Optical Materials

A Broadband Optical Diode for Linearly Polarized Light Using Symmetry-Breaking Metamaterials

(2017) Minkyung Kim et al.   Advanced Optical Materials

Colossal Terahertz Field Enhancement Using Split-Ring Resonators with a Sub-10 nm Gap

(2017) Nayeon Kim et al.   ACS Photonics

Pragmatic Metasurface Hologram at Visible Wavelength: The Balance between Diffraction Efficiency and Fabrication Compatibility

(2017) Gwanho Yoon et al.   ACS Photonics

Realization of Wafer-Scale Hyperlens Device for Sub-diffractional Biomolecular Imaging

(2017) Dasol Lee et al.   ACS Photonics

Design and fabrication of crack-junctions

(2017) Valentin Dubois et al.   Microsystems & Nanoengineering

Control of light absorbance using plasmonic grating based perfect absorber at visible and near-infrared wavelengths

(2017) Duc Minh Nguyen et al.   Scientific Reports

Demonstration of nanoimprinted hyperlens array for high-throughput sub-diffraction imaging

(2017) Minseop Byun et al.   Scientific Reports

Atomic-Layer-Deposition Assisted Formation of Wafer-Scale Double-Layer Metal Nanoparticles with Tunable Nanogap for Surface-Enhanced Raman Scattering

(2017) Yan-Qiang Cao et al.   Scientific Reports

Size-Dependent Filling Behavior of UV-Curable Di(meth)acrylate Resins into Carbon-Coated Anodic Aluminum Oxide Pores of around 20 nm

(2016) Masaru Nakagawa et al.   ACS Applied Materials & Interfaces

Complex High-Aspect-Ratio Metal Nanostructures by Secondary Sputtering Combined with Block Copolymer Self-Assembly

(2016) Hwan-Jin Jeon et al.   ADVANCED MATERIALS

Nanoscale Electrodes for Flexible Electronics by Swelling Controlled Cracking

(2016) Qiang Zhao et al.   ADVANCED MATERIALS

Crack-Defined Electronic Nanogaps

(2016) Valentin Dubois et al.   ADVANCED MATERIALS

Sub-10-nm Fin-Width Self-Aligned InGaAs FinFETs

(2016) Alon Vardi et al.   IEEE ELECTRON DEVICE LETTERS

Helium ion beam lithography on fullerene molecular resists for sub-10nm patterning

(2016) Xiaoqing Shi et al.   MICROELECTRONIC ENGINEERING

Challenges in fabrication towards realization of practical metamaterials

(2016) Gwanho Yoon et al.   MICROELECTRONIC ENGINEERING

“Sketch and Peel” Lithography for High-Resolution Multiscale Patterning

(2016) Yiqin Chen et al.   NANO LETTERS

High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

(2016) Daehan Yoo et al.   NANO LETTERS

Ultralow-Power Electronic Trapping of Nanoparticles with Sub-10 nm Gold Nanogap Electrodes

(2016) Avijit Barik et al.   NANO LETTERS

Split-Wedge Antennas with Sub-5 nm Gaps for Plasmonic Nanofocusing

(2016) Xiaoshu Chen et al.   NANO LETTERS

High-Resolution p-Type Metal Oxide Semiconductor Nanowire Array as an Ultrasensitive Sensor for Volatile Organic Compounds

(2016) Soo-Yeon Cho et al.   NANO LETTERS

Fabrication of sub-10 nm metal nanowire arrays with sub-1 nm critical dimension control

(2016) Shuang Pi et al.   NANOTECHNOLOGY

In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating

(2016) Michael G. Stanford et al.   Small

Giant photoluminescence enhancement in tungsten-diselenide–gold plasmonic hybrid structures

(2016) Zhuo Wang et al.   Nature Communications

Vacuum Rabi splitting in a plasmonic cavity at the single quantum emitter limit

(2016) Kotni Santhosh et al.   Nature Communications

Plasmonic Colors: Toward Mass Production of Metasurfaces

(2016) Emil Højlund-Nielsen et al.   Advanced Materials Technologies

Single Grain Boundary Break Junction for Suspended Nanogap Electrodes with Gapwidth Down to 1-2 nm by Focused Ion Beam Milling

(2015) Ajuan Cui et al.   ADVANCED MATERIALS

Nanofabrication by electron beam lithography and its applications: A review

(2015) Yifang Chen   MICROELECTRONIC ENGINEERING

Squeezing Photons into a Point-Like Space

(2015) Myung-Ki Kim et al.   NANO LETTERS

Quasi-3D plasmonic coupling scheme for near-field optical lithography and imaging

(2015) Yuan Wang et al.   OPTICS LETTERS

Nanogap Electrodes towards Solid State Single-Molecule Transistors

(2015) Ajuan Cui et al.   Small

Nanogap-Enhanced Terahertz Sensing of 1 nm Thick (λ/106) Dielectric Films

(2015) Hyeong-Ryeol Park et al.   ACS Photonics

A brief review of atomic layer deposition: from fundamentals to applications

(2014) Richard W. Johnson et al.   Materials Today

Low-Copy Number Protein Detection by Electrode Nanogap-Enabled Dielectrophoretic Trapping for Surface-Enhanced Raman Spectroscopy and Electronic Measurements

(2014) Leonardo Lesser-Rojas et al.   NANO LETTERS

Nanogap-Enhanced Infrared Spectroscopy with Template-Stripped Wafer-Scale Arrays of Buried Plasmonic Cavities

(2014) Xiaoshu Chen et al.   NANO LETTERS

Flat optics with designer metasurfaces

(2014) Nanfang Yu et al.   NATURE MATERIALS

Large and well-defined Rabi splitting in a semiconductor nanogap cavity

(2014) Mitsuharu Uemoto et al.   OPTICS EXPRESS

Sub-15-nm patterning of asymmetric metal electrodes and devices by adhesion lithography

(2014) David J. Beesley et al.   Nature Communications

Quantum mechanical limit to plasmonic enhancement as observed by surface-enhanced Raman scattering

(2014) Wenqi Zhu et al.   Nature Communications

Sub-10nm resolution after lift-off using HSQ/PMMA double layer resist

(2013) Marcus Rommel et al.   MICROELECTRONIC ENGINEERING

Sub-10nm patterning by focused He-ion beam milling for fabrication of downscaled graphene nano devices

(2013) Nima Kalhor et al.   MICROELECTRONIC ENGINEERING

Resolution Limits of Electron-Beam Lithography toward the Atomic Scale

(2013) Vitor R. Manfrinato et al.   NANO LETTERS

Ultrafast Nonlinear Control of Progressively Loaded, Single Plasmonic Nanoantennas Fabricated Using Helium Ion Milling

(2013) Yudong Wang et al.   NANO LETTERS

Free-standing sub-10 nm nanostencils for the definition of gaps in plasmonic antennas

(2013) Huigao Duan et al.   NANOTECHNOLOGY

Photonic Spin Hall Effect at Metasurfaces

(2013) X. Yin et al.   SCIENCE

Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves

(2013) Xiaoshu Chen et al.   Nature Communications

Approaching the strong coupling limit in single plasmonic nanorods interacting with J-aggregates

(2013) Gülis Zengin et al.   Scientific Reports

Liquid crystal based nonlinear fishnet metamaterials

(2012) Alexander Minovich et al.   APPLIED PHYSICS LETTERS

A Study of Helium Ion Beam Substrate Interaction Volume on Nanomachining Profiles in Bulk Substrates and Thin Film Membranes

(2012) R. Livengood et al.   MICROSCOPY AND MICROANALYSIS

Nanoplasmonics: Classical down to the Nanometer Scale

(2012) Huigao Duan et al.   NANO LETTERS

Reliable fabrication of 3 nm gaps between nanoelectrodes by electron-beam lithography

(2012) Marcel Manheller et al.   NANOTECHNOLOGY

Patterning by controlled cracking

(2012) Koo Hyun Nam et al.   NATURE

Direct and Transmission Milling of Suspended Silicon Nitride Membranes With a Focused Helium Ion Beam

(2012) Michael M. Marshall et al.   SCANNING

Single-Molecule Electrical Random Resequencing of DNA and RNA

(2012) Takahito Ohshiro et al.   Scientific Reports

Ultrasmall Structure Fabrication via a Facile Size Modification of Nanoimprinted Functional Silsesquioxane Features

(2011) Carlos Pina-Hernandez et al.   ACS Nano

Direct and Reliable Patterning of Plasmonic Nanostructures with Sub-10-nm Gaps

(2011) Huigao Duan et al.   ACS Nano

Neon Ion Beam Lithography (NIBL)

(2011) Donald Winston et al.   NANO LETTERS

Single digit nanofabrication by step-and-repeat nanoimprint lithography

(2011) C Peroz et al.   NANOTECHNOLOGY

Controlled Collapse of High-Aspect-Ratio Nanostructures

(2011) Huigao Duan et al.   Small

Maskless Plasmonic Lithography at 22 nm Resolution

(2011) Liang Pan et al.   Scientific Reports

Tunable fishnet metamaterials infiltrated by liquid crystals

(2010) Alexander Minovich et al.   APPLIED PHYSICS LETTERS

Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion

(2010) Huigao Duan et al.   NANO LETTERS

Trapping and Sensing 10 nm Metal Nanoparticles Using Plasmonic Dipole Antennas

(2010) Weihua Zhang et al.   NANO LETTERS

Vertically Oriented Sub-10-nm Plasmonic Nanogap Arrays

(2010) Hyungsoon Im et al.   NANO LETTERS

Identifying single nucleotides by tunnelling current

(2010) Makusu Tsutsui et al.   Nature Nanotechnology

Spherical hyperlens for two-dimensional sub-diffractional imaging at visible frequencies

(2010) Junsuk Rho et al.   Nature Communications

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processing

(2009) Nima Arjmandi et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Sub-10-nm nanolithography with a scanning helium beam

(2009) Vadim Sidorkin et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography

(2009) Joel K. W. Yang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Ultrasmall Mode Volume Plasmonic Nanodisk Resonators

(2009) Martin Kuttge et al.   NANO LETTERS

Imaging single atoms using secondary electrons with an aberration-corrected electron microscope

(2009) Y. Zhu et al.   NATURE MATERIALS

Flying plasmonic lens in the near field for high-speed nanolithography

(2008) Werayut Srituravanich et al.   Nature Nanotechnology