“Sketch and Peel” Lithography for High-Resolution Multiscale Patterning

Published 2016 View Full Article

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Title
“Sketch and Peel” Lithography for High-Resolution Multiscale Patterning
Authors
Keywords
-
Journal
NANO LETTERS
Volume 16, Issue 5, Pages 3253-3259
Publisher
American Chemical Society (ACS)
Online
2016-04-14
DOI
10.1021/acs.nanolett.6b00788

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