Nanofabrication by electron beam lithography and its applications: A review

Published 2015 View Full Article

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Title
Nanofabrication by electron beam lithography and its applications: A review
Authors
Keywords
Nanofabrication, Electron beam lithography, Nanostructure, Nanoelectronics, Nanophotonics, Metamaterial
Journal
MICROELECTRONIC ENGINEERING
Volume 135, Issue -, Pages 57-72
Publisher
Elsevier BV
Online
2015-03-23
DOI
10.1016/j.mee.2015.02.042

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