In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating

Title
In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating
Authors
Keywords
-
Journal
Small
Volume 12, Issue 13, Pages 1779-1787
Publisher
Wiley
Online
2016-02-11
DOI
10.1002/smll.201503680

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