Pattern transfer using block copolymers

Nanoscale Rings from Silicon-Containing Triblock Terpolymers

(2012) Marc D. Rodwogin et al.   ACS Applied Materials & Interfaces

Oligosaccharide/Silicon-Containing Block Copolymers with 5 nm Features for Lithographic Applications

(2012) Julia D. Cushen et al.   ACS Nano

Square Arrays of Holes and Dots Patterned from a Linear ABC Triblock Terpolymer

(2012) Hong Kyoon Choi et al.   ACS Nano

Controlled Orientation of Block Copolymers on Defect-Free Faceted Surfaces

(2012) Sung Woo Hong et al.   ADVANCED MATERIALS

High Density and Large Area Arrays of Silicon Oxide Pillars with Tunable Domain Size for Mask Etch Applications

(2012) Xiaodan Gu et al.   ADVANCED MATERIALS

High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

(2012) Xiaodan Gu et al.   ADVANCED MATERIALS

Using Sol–Gel Replications to Assess the Porosity of Block-Copolymer Derived Thin Films

(2012) Thi Hoa Nguyen et al.   Journal of Physical Chemistry C

Control of the Orientation of Symmetric Poly(styrene)-block-poly(d,l-lactide) Block Copolymers Using Statistical Copolymers of Dissimilar Composition

(2012) Imelda Keen et al.   LANGMUIR

Syndiotactic Polyallyltrimethylsilane-Based Stereoregular Diblock Copolymers: Syntheses and Self-Assembled Nanostructures

(2012) Jing-Yu Lee et al.   MACROMOLECULES

Synthesis, Thermodynamics, and Dynamics of Poly(4-tert-butylstyrene-b-methyl methacrylate)

(2012) Justin G. Kennemur et al.   MACROMOLECULES

Thin Film Self-Assembly of Poly(trimethylsilylstyrene-b-d,l-lactide) with Sub-10 nm Domains

(2012) Julia D. Cushen et al.   MACROMOLECULES

Silicon Patterning Using Self-assembled PS-b-PAA Diblock Copolymer Masks for Black Silicon Fabrication via Plasma Etching

(2012) Xin Zhang et al.   Plasma Processes and Polymers

Hierarchical self-assembly structures of POSS-containing polypeptide block copolymers synthesized using a combination of ATRP, ROP and click chemistry

(2012) Yung-Chih Lin et al.   Polymer Chemistry

Unidirectionally aligned line patterns driven by entropic effects on faceted surfaces

(2012) S. W. Hong et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films

(2012) A. Tavakkoli K. G. et al.   SCIENCE

Polarity-Switching Top Coats Enable Orientation of Sub-10-nm Block Copolymer Domains

(2012) C. M. Bates et al.   SCIENCE

Multiblock Polymers: Panacea or Pandora's Box?

(2012) F. S. Bates et al.   SCIENCE

10 nm Scale Cylinder–Cubic Phase Transition Induced by Caramelization in Sugar-Based Block Copolymers

(2012) Issei Otsuka et al.   ACS Macro Letters

High-Aspect-Ratio Perpendicular Orientation of PS-b-PDMS Thin Films under Solvent Annealing

(2012) Jeong Gon Son et al.   ACS Macro Letters

Non-lift-off Block Copolymer Lithography of 25 nm Magnetic Nanodot Arrays

(2011) A. Baruth et al.   ACS Applied Materials & Interfaces

Circular Nanopatterns over Large Areas from the Self-Assembly of Block Copolymers Guided by Shallow Trenches

(2011) Sung Woo Hong et al.   ACS Nano

Nanofabrication of Broad-Band Antireflective Surfaces Using Self-Assembly of Block Copolymers

(2011) Birgit Päivänranta et al.   ACS Nano

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates

(2011) Qing Peng et al.   ACS Nano

Fabrication of Silicon Oxide Nanodots with an Areal Density Beyond 1 Teradots Inch−2

(2011) Ji Xu et al.   ADVANCED MATERIALS

Mass production of uniform-sized nanoporous silicon nanowire anodes via block copolymer lithography

(2011) Byoung Man Bang et al.   Energy & Environmental Science

Enhanced polymeric lithography resists via sequential infiltration synthesis

(2011) Yu-Chih Tseng et al.   JOURNAL OF MATERIALS CHEMISTRY

Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis

(2011) Yu-Chih Tseng et al.   Journal of Physical Chemistry C

Highly Ordered Nanoporous Thin Films from Photocleavable Block Copolymers

(2011) Hui Zhao et al.   MACROMOLECULES

Rapid Assembly of Nanolines with Precisely Controlled Spacing from Binary Blends of Block Copolymers

(2011) Xiaojiang Zhang et al.   MACROMOLECULES

Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined Chemical Template with Morphology Control by Solvent Vapor

(2011) Yasuhiko Tada et al.   MACROMOLECULES

Patterned Magnetic Media Made by Self-Assembled Block-Copolymer Lithography

(2011) C.A. Ross et al.   MRS BULLETIN

Density Doubling of Block Copolymer Templated Features

(2011) Nathanael L. Y. Wu et al.   NANO LETTERS

Highly Tunable Self-Assembled Nanostructures from a Poly(2-vinylpyridine-b-dimethylsiloxane) Block Copolymer

(2011) Jae Won Jeong et al.   NANO LETTERS

Patterning of various silicon structures via polymer lithography and catalytic chemical etching

(2011) Jung-Pil Lee et al.   NANOTECHNOLOGY

Polylactide−Poly(dimethylsiloxane)−Polylactide Triblock Copolymers as Multifunctional Materials for Nanolithographic Applications

(2010) Marc D. Rodwogin et al.   ACS Nano

Fast Assembly of Ordered Block Copolymer Nanostructures through Microwave Annealing

(2010) Xiaojiang Zhang et al.   ACS Nano

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

(2010) Qing Peng et al.   ADVANCED MATERIALS

Monitoring PMMA Elimination by Reactive Ion Etching from a Lamellar PS-b-PMMA Thin Film byex SituTEM Methods

(2010) Richard A. Farrell et al.   MACROMOLECULES

A Path to Ultranarrow Patterns Using Self-Assembled Lithography

(2010) Yeon Sik Jung et al.   NANO LETTERS

Fabrication of Diverse Metallic Nanowire Arrays Based on Block Copolymer Self-Assembly

(2010) Yeon Sik Jung et al.   NANO LETTERS

Complex self-assembled patterns using sparse commensurate templates with locally varying motifs

(2010) Joel K. W. Yang et al.   Nature Nanotechnology

Graphene nanomesh

(2010) Jingwei Bai et al.   Nature Nanotechnology

High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

(2010) Dmitriy L. Voronov et al.   OPTICS LETTERS

Nanoporous hard etch masks using silicon-containing block copolymer thin films

(2010) Se Jin Ku et al.   POLYMER

Controlling Order in Block Copolymer Thin Films for Nanopatterning Applications

(2010) Andrew P. Marencic et al.   Annual Review of Chemical and Biomolecular Engineering

Nanoscale Patterning of Organic Monolayers by Catalytic Stamp Lithography: Scope and Limitations

(2009) Hidenori Mizuno et al.   ACS Applied Materials & Interfaces

Selective Area Control of Self-Assembled Pattern Architecture Using a Lithographically Patternable Block Copolymer

(2009) Joan K. Bosworth et al.   ACS Nano

Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching

(2009) Shih-Wei Chang et al.   ADVANCED FUNCTIONAL MATERIALS

A Novel Approach to Addressable 4 Teradot/in.2Patterned Media

(2009) Shuaigang Xiao et al.   ADVANCED MATERIALS

Self-Assembled Nanoscale Ring Arrays from a Polystyrene-b-polyferrocenylsilane-b-poly(2-vinylpyridine)Triblock Terpolymer Thin Film

(2009) Vivian P. Chuang et al.   ADVANCED MATERIALS

One-Step Direct-Patterning Template Utilizing Self-Assembly of POSS-Containing Block Copolymers

(2009) Tomoyasu Hirai et al.   ADVANCED MATERIALS

Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns

(2009) Joona Bang et al.   ADVANCED MATERIALS

Patterning and Templating for Nanoelectronics

(2009) Kosmas Galatsis et al.   ADVANCED MATERIALS

Block Copolymer Based Nanostructures: Materials, Processes, and Applications to Electronics

(2009) Ho-Cheol Kim et al.   CHEMICAL REVIEWS

Lateral Ordering of Cylindrical Microdomains Under Solvent Vapor

(2009) Soojin Park et al.   MACROMOLECULES

Templated Self-Assembly of Square Symmetry Arrays from an ABC Triblock Terpolymer

(2009) Vivian P. Chuang et al.   NANO LETTERS

Ordering in thin films of block copolymers: Fundamentals to potential applications

(2009) I.W. Hamley   PROGRESS IN POLYMER SCIENCE

Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order

(2009) S. Park et al.   SCIENCE

A Simple Top-Down/Bottom-Up Approach to Sectored, Ordered Arrays of Nanoscopic Elements Using Block Copolymers

(2009) Soojin Park et al.   Small

Preparation of Metallic Line Patterns from Functional Block Copolymers

(2009) Soojin Park et al.   Small

Well-Ordered Thin-Film Nanopore Arrays Formed Using a Block-Copolymer Template

(2009) Yeon Sik Jung et al.   Small

Thickness dependent hierarchical meso/nano scale morphologies of a metal-containing block copolymer thin film induced by hybrid annealing and their pattern transfer abilities

(2009) Muruganathan Ramanathan et al.   Soft Matter

Simple orientational control over cylindrical organic–inorganic block copolymer domains for etch mask applications

(2009) Muruganathan Ramanathan et al.   THIN SOLID FILMS

Perpendicular orientation of cylindrical domains upon solvent annealing thin films of polystyrene-b-polylactide

(2009) Marylène Vayer et al.   THIN SOLID FILMS

Nanostructured Magnetic Thin Films from Organometallic Block Copolymers: Pyrolysis of Self-Assembled Polystyrene-block-poly(ferrocenylethylmethylsilane)

(2008) David A. Rider et al.   ACS Nano

Control of Self-Assembly of Lithographically Patternable Block Copolymer Films

(2008) Joan K. Bosworth et al.   ACS Nano

A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates

(2008) Soojin Park et al.   ACS Nano

Ordering of PS-b-P4VP on Patterned Silicon Surfaces

(2008) Soojin Park et al.   ACS Nano

Using Cylindrical Domains of Block Copolymers To Self-Assemble and Align Metallic Nanowires

(2008) Jinan Chai et al.   ACS Nano

Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films

(2008) S. Park et al.   ADVANCED MATERIALS

Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers

(2008) Seong-Jun Jeong et al.   ADVANCED MATERIALS

Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography

(2008) Yuk-Hong Ting et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Square Packing and Structural Arrangement of ABC Triblock Copolymer Spheres in Thin Films

(2008) Chuanbing Tang et al.   MACROMOLECULES

SAXS Analysis of the Order−Disorder Transition and the Interaction Parameter of Polystyrene-block-poly(methyl methacrylate)

(2008) Yue Zhao et al.   MACROMOLECULES

Nanofabricated Concentric Ring Structures by Templated Self-Assembly of a Diblock Copolymer

(2008) Yeon Sik Jung et al.   NANO LETTERS

Nanowire Conductive Polymer Gas Sensor Patterned Using Self-Assembled Block Copolymer Lithography

(2008) Yeon Sik Jung et al.   NANO LETTERS

From Nanorings to Nanodots by Patterning with Block Copolymers

(2008) Soojin Park et al.   NANO LETTERS

The fabrication of 20 nm half-pitch gratings by corrugation-directed self-assembly

(2008) Ho-Cheol Kim et al.   NANOTECHNOLOGY

Patterning sub-10 nm line patterns from a block copolymer hybrid

(2008) Sang-Min Park et al.   NANOTECHNOLOGY

Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

(2008) R. Ruiz et al.   SCIENCE

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

(2008) I. Bita et al.   SCIENCE