Patterning sub-10 nm line patterns from a block copolymer hybrid

Title
Patterning sub-10 nm line patterns from a block copolymer hybrid
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 45, Pages 455304
Publisher
IOP Publishing
Online
2008-10-09
DOI
10.1088/0957-4484/19/45/455304

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