Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography

Published 2008 View Full Article

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Title
Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 5, Pages 1684
Publisher
American Vacuum Society
Online
2008-10-14
DOI
10.1116/1.2966433

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