Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

Published 2008 View Full Article

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Title
Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly
Authors
Keywords
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Journal
SCIENCE
Volume 321, Issue 5891, Pages 936-939
Publisher
American Association for the Advancement of Science (AAAS)
Online
2008-08-15
DOI
10.1126/science.1157626
References
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