Silicon Patterning Using Self-assembled PS-b-PAA Diblock Copolymer Masks for Black Silicon Fabrication via Plasma Etching

Title
Silicon Patterning Using Self-assembled PS-b-PAA Diblock Copolymer Masks for Black Silicon Fabrication via Plasma Etching
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 9, Issue 10, Pages 968-974
Publisher
Wiley
Online
2012-07-03
DOI
10.1002/ppap.201100198

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