Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

Title
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 22, Issue 45, Pages 5129-5133
Publisher
Wiley
Online
2010-09-08
DOI
10.1002/adma.201002465

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