Patterning of various silicon structures via polymer lithography and catalytic chemical etching

Published 2011 View Full Article

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Title
Patterning of various silicon structures via polymer lithography and catalytic chemical etching
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 22, Issue 27, Pages 275305
Publisher
IOP Publishing
Online
2011-05-21
DOI
10.1088/0957-4484/22/27/275305

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