High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

Published 2010 View Full Article

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Title
High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths
Authors
Keywords
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Journal
OPTICS LETTERS
Volume 35, Issue 15, Pages 2615
Publisher
The Optical Society
Online
2010-07-29
DOI
10.1364/ol.35.002615
References
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