Monitoring PMMA Elimination by Reactive Ion Etching from a Lamellar PS-b-PMMA Thin Film byex SituTEM Methods

Published 2010 View Full Article

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Title
Monitoring PMMA Elimination by Reactive Ion Etching from a Lamellar PS-b-PMMA Thin Film byex SituTEM Methods
Authors
Keywords
-
Journal
MACROMOLECULES
Volume 43, Issue 20, Pages 8651-8655
Publisher
American Chemical Society (ACS)
Online
2010-10-04
DOI
10.1021/ma101827u

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