High Density and Large Area Arrays of Silicon Oxide Pillars with Tunable Domain Size for Mask Etch Applications
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Title
High Density and Large Area Arrays of Silicon Oxide Pillars with Tunable Domain Size for Mask Etch Applications
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 24, Issue 40, Pages 5505-5511
Publisher
Wiley
Online
2012-08-10
DOI
10.1002/adma.201201278
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