High Density and Large Area Arrays of Silicon Oxide Pillars with Tunable Domain Size for Mask Etch Applications

Title
High Density and Large Area Arrays of Silicon Oxide Pillars with Tunable Domain Size for Mask Etch Applications
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 24, Issue 40, Pages 5505-5511
Publisher
Wiley
Online
2012-08-10
DOI
10.1002/adma.201201278

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