Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching

Title
Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 19, Issue 15, Pages 2495-2500
Publisher
Wiley
Online
2009-05-21
DOI
10.1002/adfm.200900181

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