High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates
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Title
High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 24, Issue 42, Pages 5688-5694
Publisher
Wiley
Online
2012-08-20
DOI
10.1002/adma.201202361
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