Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma
出版年份 2017 全文链接
标题
Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 14, Issue 12, Pages 1700087
出版商
Wiley
发表日期
2017-06-27
DOI
10.1002/ppap.201700087
参考文献
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