Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma

Numerical characterization of magnetized capacitively coupled argon plasmas driven by combined dc/rf sources

(2017) Shali Yang et al.   PHYSICS OF PLASMAS

Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

(2016) E Schüngel et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges

(2016) Jan Trieschmann et al.   Plasma Processes and Polymers

Low-Temperature Atmospheric Pressure Plasma Processes for “Green” Third Generation Photovoltaics

(2016) Davide Mariotti et al.   Plasma Processes and Polymers

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

(2016) Bastien Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry

(2016) B Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Implicit electrostatic particle-in-cell/Monte Carlo simulation for the magnetized plasma: Algorithms and application in gas-inductive breakdown

(2015) Hong-Yu Wang et al.   Chinese Physics B

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

(2015) Bastien Bruneau et al.   PHYSICAL REVIEW LETTERS

Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

(2015) T Lafleur   PLASMA SOURCES SCIENCE & TECHNOLOGY

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

(2014) B Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

(2014) B Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges

(2013) T. Lafleur et al.   APPLIED PHYSICS LETTERS

The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

(2013) Ihor Korolov et al.   APPLIED PHYSICS LETTERS

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

(2013) Pierre-Alexandre Delattre et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Secondary electron induced asymmetry in capacitively coupled plasmas

(2013) T Lafleur et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

(2013) Jan Trieschmann et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

(2013) T Lafleur et al.   PLASMA PHYSICS AND CONTROLLED FUSION

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

(2012) T. Lafleur et al.   APPLIED PHYSICS LETTERS

Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

(2012) T. Lafleur et al.   APPLIED PHYSICS LETTERS

The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

(2012) E. Schüngel et al.   JOURNAL OF APPLIED PHYSICS

Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas

(2012) Quan-Zhi Zhang et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

(2012) T Lafleur et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition

(2012) Francoise Massines et al.   Plasma Processes and Polymers

Making a geometrically asymmetric capacitive rf discharge electrically symmetric

(2011) Julian Schulze et al.   APPLIED PHYSICS LETTERS

Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: II. Self-bias voltage effects in capacitively coupled plasmas

(2011) Wei Jiang et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas

(2010) Kallol Bera et al.   JOURNAL OF APPLIED PHYSICS

Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges: experiment, simulation, and model

(2010) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: I. Analysis of numerical techniques

(2010) Hong-yu Wang et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

(2009) J. Schulze et al.   JOURNAL OF APPLIED PHYSICS

The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

(2009) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Breakdown of a Space Charge Limited Regime of a Sheath in a Weakly Collisional Plasma Bounded by Walls with Secondary Electron Emission

(2009) D. Sydorenko et al.   PHYSICAL REVIEW LETTERS

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

(2008) Z Donkó et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Plasma-sheath instability in Hall thrusters due to periodic modulation of the energy of secondary electrons in cyclotron motion

(2008) D. Sydorenko et al.   PHYSICS OF PLASMAS