Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

标题
Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 1, Pages 015021
出版商
IOP Publishing
发表日期
2014-12-23
DOI
10.1088/0963-0252/24/1/015021

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