PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

标题
PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 2, Pages 025205
出版商
IOP Publishing
发表日期
2008-12-19
DOI
10.1088/0022-3727/42/2/025205

向作者/读者发起求助以获取更多资源

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started