Secondary electron induced asymmetry in capacitively coupled plasmas

标题
Secondary electron induced asymmetry in capacitively coupled plasmas
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 13, Pages 135201
出版商
IOP Publishing
发表日期
2013-02-26
DOI
10.1088/0022-3727/46/13/135201

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started