Numerical characterization of magnetized capacitively coupled argon plasmas driven by combined dc/rf sources
出版年份 2017 全文链接
标题
Numerical characterization of magnetized capacitively coupled argon plasmas driven by combined dc/rf sources
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 24, Issue 3, Pages 033504
出版商
AIP Publishing
发表日期
2017-03-28
DOI
10.1063/1.4977806
参考文献
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