Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Electron heating in capacitively coupled plasmas revisited

(2014) T Lafleur et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

(2014) B Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

(2014) B Bruneau et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Effect of Ion Energy on Microcrystalline Silicon Material and Devices: A Study Using Tailored Voltage Waveforms

(2014) Bastien Bruneau et al.   IEEE Journal of Photovoltaics

Ion Energy Threshold in Low-Temperature Silicon Epitaxy for Thin-Film Crystalline Photovoltaics

(2014) Bastien Bruneau et al.   IEEE Journal of Photovoltaics

Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges

(2013) T. Lafleur et al.   APPLIED PHYSICS LETTERS

The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

(2013) Ihor Korolov et al.   APPLIED PHYSICS LETTERS

Comparisons of sets of electron–neutral scattering cross sections and swarm parameters in noble gases: I. Argon

(2013) L C Pitchford et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

(2012) T. Lafleur et al.   APPLIED PHYSICS LETTERS

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

(2012) T Lafleur et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas

(2011) Yong-Xin Liu et al.   PHYSICAL REVIEW LETTERS

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

(2010) Erik V Johnson et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

(2010) T Gans et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

(2009) J. Schulze et al.   JOURNAL OF APPLIED PHYSICS

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach

(2008) T. Mussenbrock et al.   PHYSICAL REVIEW LETTERS