Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

标题
Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 8, Pages 084016
出版商
IOP Publishing
发表日期
2013-02-02
DOI
10.1088/0022-3727/46/8/084016

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