Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

标题
Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 49, Issue 26, Pages 265203
出版商
IOP Publishing
发表日期
2016-05-31
DOI
10.1088/0022-3727/49/26/265203

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