Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition
出版年份 2012 全文链接
标题
Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 9, Issue 11-12, Pages 1041-1073
出版商
Wiley
发表日期
2012-08-07
DOI
10.1002/ppap.201200029
参考文献
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